微小摩擦测试系统设计

doi:10.3969/j.issn.1000-1158.2013.05.11

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摘要针对介观尺度下的微小摩擦测试系统进行了设计,给出了一种基于平行梁结构的微小摩擦力测试方法及其测试装置,介绍了该测试装置的设计方法、测力传感器的结构设计、微小摩擦力测试原理及测力传感器标定方法。通过光反射法对测力传感器进行标定及微小摩擦力测量,通过对测量数据分析,得到微小摩擦力实验规律。实验结果表明:该装置分辨率可达到为10 μN,可满足短行程高分辨率的微小摩擦力测试的需要,同时对测量过程中出现的载荷不稳定情况进行了分析。

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	许颖
	于化东
	于占江
	李一全

关键词 ：计量学；微小摩擦, 光反射法, 测力传感器, 平行梁

Abstract：The law of micro-friction in meso-scale is studied. One optical testing method of micro friction based on the structure of parallel cantilever is given and the testing system is designed, the composition of test system, testing method, the design of force sensor , the testing method and the calibration of force sensor are introduced. The force sensor is calibrated and the deformation of sensor is measured by light reflection. Then the micro friction is obtained by analyzing data. The results of the experiment show the resolution of specification of micro friction testing is 10 μN, which could meet the demands of micro friction testing with short stroke and high resolution and realize the precise test of micro friction. And at the same time it has been analysed which load is unstable during testing.

Key words： Metrology Micro-friction Reflection method Force sensor Parallel cantilever

作者简介: 许颖（1980-）,女,吉林东丰人,长春理工大学讲师,博士研究生,主要从事微摩擦磨损及测量研究。xuying@cust.edu.cn

引用本文:

许颖, 于化东, 于占江, 李一全. 微小摩擦测试系统设计[J]. 计量学报, 2013, 34(5): 452-456.
XU Ying, YU Hua-dong, YU Zhan-jiang, LI Yi-quan. Design of the Micro-friction Testing System. Acta Metrologica Sinica, 2013, 34(5): 452-456.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2013.05.11 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2013/V34/I5/452

［1］路新春,雒建斌,温诗铸.纳米级摩擦磨损实验进展［J］.仪器仪表学报,1995,16(S1):60-63.
［2］李源,邵力,栗大超,等. 用于微结构几何量测量的MEMS 三维微触觉传感器的性能测试［J］.计量学报,2008,29(1):21-25.
［3］温诗铸.纳米摩擦学研究现状与展望［J］.仪器仪表学报,1995,16(S1):32-37.
［4］薛群基,张军.微观摩擦学研究进展［J］.摩擦学学报1994,14(4):360-369.
［5］刘莹,温诗铸. 微机电系统中微摩擦特性及控制研究［J］.机械工程学报,2002,38(3):1-5.
［6］解旭辉,王芸,李婷.基于伺服自动聚焦的精密激光位移传感器研究［J］. 计量学报,2006,27(3):212-215.
［7］刘永平,龚俊,辛舟,等.往复式摩擦磨损试验机及其计算机控制系统设计［J］. 仪器仪表报,2010,31(8):1750-1755.
［8］董云开.微尺度形貌修饰硅表面的摩擦特性研究［D］.北京: 清华大学.2007.
［9］曹长江,张琛,江莹澜.一种基于电磁型微马达的微摩擦测试装置［J］.仪表技术与传感器,2000,(10):36-38.
［10］陈晓阳,沈雪瑾,等.薄膜型硅微机械的摩擦学问题［J］.中国机械工程,2002,13(1):36-40.
［11］于正林,吴一辉,等.光反射法微摩擦测试仪［J］.中国机械工程,2005,16(14):1299-1302.
［12］王梁,程先华.微摩擦测试的微力传感器设计［J］. 上海交通大学学报,2005,39(11): 1792-1798.
［13］ Mollenhauer O, Ahmed S I U, Spiller F, et al. High-precision positioning and measurement systems for micro-tribotesting［J］. Tribotest,2006,12(3): 189-199.
［14］ Yu H D, Shi Q Y, Li Y Q, et al. Design and Calibration of Sensing System forHigh-precision Meso-scale Friction Test［C］//Proceedings of the 2011 IEEE ICMA, 2011:1093-1097.
［15］ Gerbig Y B, Ahmed S I U, Chetwynd D G. Friction and wear behavior of pyramidal nano-scaled surface features［J］. Wear, 2008, 265(3/4):497-506.
［16］ Barriga J, Fernndez-Diaz B, Juarros A, et al. Microtribological analysis of gold and copper contacts ［J］. Tribology International,2007,40(10-12):1526-1530.